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Layout and EB data reduction - Comparison of OASIS based approach with format-speciflic reversible compressions - art. no. 66070X 会议论文
会议名称: Conference on Photomask and Next-Generation Lithography Mask Technology XIV. 会议地点: Yokohama, JAPAN. 会议日期: APR 17-19, 2007
作者:  Pai, Ravi;  Pereira, Mark;  Manu, C. S.;  Parchuri, Anil;  Baruah, Barsha
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/07
Fast file size estimation of mask data conversion from OASIS to GDS2 - art. no. 66072P 会议论文
会议名称: Conference on Photomask and Next-Generation Lithography Mask Technology XIV. 会议地点: Yokohama, JAPAN. 会议日期: APR 17-19, 2007
作者:  Endo, Masakazu;  Taniguchi, Yoshiyuki;  Nishizawa, Kuninori;  Kato, Kokoro
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/07
Data exploder for Variable Shaped Beam exposure - art. no. 66070W 会议论文
会议名称: Conference on Photomask and Next-Generation Lithography Mask Technology XIV. 会议地点: Yokohama, JAPAN. 会议日期: APR 17-19, 2007
作者:  Nogatch, John;  Kirsch, Hartmut;  Shi, Jun
收藏  |  浏览/下载：6/0  |  提交时间：2019/12/07
Data Exploder  inspection  Mask Data Preparation (MDP)  OASIS.VSB  Variable Shaped Beam (VSB)  
Evaluation of OASIS.VSB (SEMI P44) for practical use 会议论文
会议名称: Conference on Photomask and Next-Generation Lithography Mask Technology XIII. 会议地点: Yokohama, JAPAN. 会议日期: APR 18-20, 2006
作者:  Kuriyama, Koki;  Suzuki, Toshio;  Narukawa, Shogo;  Mohri, Hiroshi;  Hoga, Morihisa;  Hayashi, Naoya
收藏  |  浏览/下载：1/0  |  提交时间：2019/12/07
From GDSII to OASIS: Practical support tools for data processing flow transition 会议论文
会议名称: Conference on Photomask and Next-Generation Lithography Mask Technology XIII. 会议地点: Yokohama, JAPAN. 会议日期: APR 18-20, 2006
作者:  Endo, Masakazu;  Nishizawa, Kuninori;  Kato, Kokoro
收藏  |  浏览/下载：7/0  |  提交时间：2019/12/07
The unified mask data format based on OASIS for VSB EB writers 会议论文
会议名称: Conference on Photomask and Next-Generation Lithography Mask Technology XII. 会议地点: Yokohama, JAPAN. 会议日期: APR 13-15, 2005
作者:  Suzuki, T;  Hirumi, J;  Hojyo, Y;  Kawase, Y;  Sakamoto, S;  Kuriyama, K;  Narukawa, S;  Hoga, M
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/07
GDSII  MDP  EB  VSB  OASIS  EDA  RET