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Net Tracing and Classification Analysis on E-Beam Die-to-Database Inspection 会议论文
会议名称: 30th Conference on Metrology, Inspection, and Process Control for Microlithography. 会议地点: San Jose, CA. 会议日期: FEB 22-25, 2016
作者:  Gao, Weihong;  Zeng, Xuefeng;  Lin, Peter;  Pan, Yan;  Song, Ho Young;  Hoang Nguyen;  Cai, Na;  Chen, Zhijin;  Zafar, Khurram
收藏  |  浏览/下载：24/0  |  提交时间：2019/12/09
Net Tracing Classification  Die-to-database Inspection  voltage contrast defect  Hotspot inspection  
Net Tracing and Classification Analysis on E-Beam Die-to-Database Inspection 会议论文
会议名称: 30th Conference on Metrology, Inspection, and Process Control for Microlithography. 会议地点: San Jose, CA. 会议日期: FEB 22-25, 2016
作者:  Gao, Weihong;  Zeng, Xuefeng;  Lin, Peter;  Pan, Yan;  Song, Ho Young;  Hoang Nguyen;  Cai, Na;  Chen, Zhijin;  Zafar, Khurram
收藏  |  浏览/下载：16/0  |  提交时间：2019/12/09
Net Tracing Classification  Die-to-database Inspection  voltage contrast defect  Hotspot inspection  
Die-to-database mask inspection with variable sensitivity 会议论文
会议名称: Conference on Photomask and Next-Generation Lithography Mask Technology XV. 会议地点: Yokohama, JAPAN. 会议日期: APR 16-18, 2008
作者:  Tsuchiya, Hideo;  Tokita, Masakazu;  Nomura, Takehiko;  Inoue, Tadao
收藏  |  浏览/下载：45/0  |  提交时间：2019/12/07
die-to-database  inspection  review  Mask Data Rank  design intent  OASIS  layout analysis