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The prospects for hierarchical data processing with growing complexity of the post-tapeout flow 会议论文
会议名称: Conference on Design and Process Integration for Microelectronic Manufacturing III. 会议地点: San Jose, CA. 会议日期: MAR 03-04, 2005
作者:  Schulze, S;  Sahouria, E
收藏  |  浏览/下载:11/0  |  提交时间:2019/12/07
mask data preparation  hierarchical processing  distributed  multithreaded  OASIS  OASIS  NSB  
Extending OASIS for the unification of mask data representation 会议论文
会议名称: 21st European Mask and Lithography Conference (EMLC 2005). 会议地点: Dresden, GERMANY. 会议日期: JAN 31-FEB 03, 2005
作者:  Sahouria, E;  Schulze, S;  Suzuki, T;  Hirumi, J
收藏  |  浏览/下载:9/0  |  提交时间:2019/12/07
OASIS - based unification of mask data representation 会议论文
会议名称: Conference on Photomask and Next-Generation Lithography Mask Technology XI. 会议地点: Yokohama, JAPAN. 会议日期: APR 14-16, 2004
作者:  Sahouria, E;  Schulze, S
收藏  |  浏览/下载:11/0  |  提交时间:2019/12/07
GDSII stream  OASIS  integrated circuit layout  mask making  photomask  data format  variable shaped beam