干旱区生态环境知识资源中心(Arid): Preparation of Zr-based Thin Film Metallic Glass and Determination of Its Optical Constant

Arid

DOI	10.3788/gzxb20204910.1031001
	Preparation of Zr-based Thin Film Metallic Glass and Determination of Its Optical Constant
	Wu Man-yu; Huang Shui-ping
通讯作者	Wu, MY
来源期刊	ACTA PHOTONICA SINICA
ISSN	1004-4213
出版年	2020
卷号	49 期号:10
英文摘要	The aim of this paper is to obtain the optical constants of the thin film metallic glass in the visible and near-infrared region. Zr-based ZrCuNiAl( 64.13: 15.75: 10.12: 10% at) thin film metallic glass was prepared on Si substrate using vacuum magnetron sputtering technology at first, then the ellipsometric parameters of the sample at three different angles of incidence were measured by spectroscopic ellipsometry. The optical constants and thickness of the film in the visible and near-infrared region were obtained by fitting the measured ellipsometric parameters using the Drude-Lorentz two -oscillator model. Moreover, the thickness of the sample was also measured by grazing incidence X-ray reflection to verify the reliability of the measurement results of the ellipsometer. The results show that the thicknesses of the sample measured by the two methods are consistent. The Drude-Lorentz two -oscillator model can describe the optical properties of the Zr-based thin film metallic glass in the visible and near -infrared region well In the visible and near-infrared region, both of psi and Delta decrease with increasing incident angle; the real parts of the dielectric constants are negative arid decrease with increasing wavelength; the imaginary parts of the dielectric constants are positive and increase with increasing wavelength. The refractive index of the sample is obviously smaller than the extinction coefficient. The refractive index has its maximum at 1 070 nm, and the extinction coefficient has an inflection point around 1 070 nm. It follows that thin film metallic glass has the optical properties of both general metal and glass. The investigatedresults of this paper will be helpful for the investigation and measurement of the optical properties of Zr-based and the other kinds of thin film metallic glass.
英文关键词	Zr-based metallic glass Thin films Optical constants Visible and near-infrared region Ellipsometry Drude-lorentz two-oscillator model Magnetron sputtering
类型	Article
语种	中文
收录类别	ESCI
WOS记录号	WOS:000580984300014
WOS关键词	SPECTROSCOPIC ELLIPSOMETRY
WOS类目	Optics
WOS研究方向	Optics
资源类型	期刊论文
条目标识符	http://119.78.100.177/qdio/handle/2XILL650/334690
作者单位	[Wu Man-yu; Huang Shui-ping] Ningbo Univ, Sch Phys Sci & Technol, Ningbo 315211, Zhejiang, Peoples R China
推荐引用方式 GB/T 7714	Wu Man-yu,Huang Shui-ping. Preparation of Zr-based Thin Film Metallic Glass and Determination of Its Optical Constant[J],2020,49(10).
APA	Wu Man-yu,&Huang Shui-ping.(2020).Preparation of Zr-based Thin Film Metallic Glass and Determination of Its Optical Constant.ACTA PHOTONICA SINICA,49(10).
MLA	Wu Man-yu,et al."Preparation of Zr-based Thin Film Metallic Glass and Determination of Its Optical Constant".ACTA PHOTONICA SINICA 49.10(2020).