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DOI	10.5806/AST.2016.29.5.219
	Optimization of solid phase extraction and simultaneous determination of trace anions in concentrated hydrofluoric acid by ion chromatography
	Yoon, Suk-Hwan; Jo, Dong-ho; Kim, Hyun-Ji; Shin, Ho-Sang
通讯作者	Shin, HS
来源期刊	ANALYTICAL SCIENCE AND TECHNOLOGY
ISSN	1225-0163
EISSN	2288-8985
出版年	2016
卷号	29 期号:5 页码:219-224
英文摘要	A sensitive method to detect trace anions in hydrofluoric acid (HF) by solid-phase extraction (SPE) clean-up and ion chromatography (IC) was described. Fluoride in HF solution was eliminated with solid-phase extraction, and residual fluoride, acetate, chloride, bromide, nitrate, phosphate and sulfate were consecutively separated with IC. The SPE parameters (selection of adsorbent, sample volume and pH, elution solvent and its volume) were optimized and selected. The removal effect of fluoride in HF solution was the best on Oasis WAX column, and the optimum conditions (1.0 mL of 25 % HF solution and 50 mM ammonium acetate 5 mL as elution solvent) were established by the variation of parameters. Under the established condition, the method detection limits of chloride, bromide, nitrate, phosphate, and sulfate were 0.04+/-0.30 mu g/L in 25 % HF solutions (w/w) and the relative standard deviation was less than 5 % at concentrations of 20.0 and 40.0 mu g/L. The concentrations of anions in a 25 % HF had detectable levels of 4.2 to 47.5 mu g/L. The method was sensitive, reproducible and simple enough to permit the reliable routine analysis of anions in HF solution used in the process of producing semiconductors.
英文关键词	solid-phase extraction anion ion chromatography hydrofluoric acid
类型	Article
语种	其他
开放获取类型	Bronze
收录类别	ESCI
WOS记录号	WOS:000406774500002
WOS类目	Chemistry, Analytical
WOS研究方向	Chemistry
资源类型	期刊论文
条目标识符	http://119.78.100.177/qdio/handle/2XILL650/331851
作者单位	[Yoon, Suk-Hwan; Jo, Dong-ho; Kim, Hyun-Ji] Soulbrain Co Ltd, Gongju 32598, Chung Nam, South Korea; [Shin, Ho-Sang] Kongju Natl Univ, Dept Environm Educ, Gongju 32588, Chung Nam, South Korea
推荐引用方式 GB/T 7714	Yoon, Suk-Hwan,Jo, Dong-ho,Kim, Hyun-Ji,et al. Optimization of solid phase extraction and simultaneous determination of trace anions in concentrated hydrofluoric acid by ion chromatography[J],2016,29(5):219-224.
APA	Yoon, Suk-Hwan,Jo, Dong-ho,Kim, Hyun-Ji,&Shin, Ho-Sang.(2016).Optimization of solid phase extraction and simultaneous determination of trace anions in concentrated hydrofluoric acid by ion chromatography.ANALYTICAL SCIENCE AND TECHNOLOGY,29(5),219-224.
MLA	Yoon, Suk-Hwan,et al."Optimization of solid phase extraction and simultaneous determination of trace anions in concentrated hydrofluoric acid by ion chromatography".ANALYTICAL SCIENCE AND TECHNOLOGY 29.5(2016):219-224.