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Arid

DOI	10.1117/12.964293
	Generating Well-Behaved OASIS Files for Mask Data Processing
	Hung, D.1; Canepa, J. P.1; Kuo, K.1; Jou, J. G.2
通讯作者	Hung, D.
会议名称	SPIE Conference on Photomask Technology held as Part of the 32nd International Symposium on Photomask Technology
会议日期	SEP 10-13, 2012
会议地点	Monterey, CA
英文摘要	Since the introduction of OASIS 1.0, the OASIS file format has gradually become adopted across the semiconductor manufacturing industry for advanced technology nodes. However, within the range of possible OASIS format options, choices made during file creation can result in inefficiencies in mask data processing. This paper starts by pointing out the relation between generating OASIS files and mask data preparation runtime. We then present some strategies and methodologies on generating well-behaved OASIS files. We conclude with some comments on the OASIS standard for the future.
英文关键词	mask data preparation performance OASIS distributed processing file generation
来源出版物	PHOTOMASK TECHNOLOGY 2012
ISSN	0277-786X
EISSN	1996-756X
出版年	2012
卷号	8522
EISBN	978-0-8194-9260-9
出版者	SPIE-INT SOC OPTICAL ENGINEERING
类型	Proceedings Paper
语种	英语
国家	USA;Taiwan
收录类别	CPCI-S
WOS记录号	WOS:000316638400030
WOS类目	Nanoscience & Nanotechnology ; Optics
WOS研究方向	Science & Technology - Other Topics ; Optics
资源类型	会议论文
条目标识符	http://119.78.100.177/qdio/handle/2XILL650/301251
作者单位	1.Synopsys Inc, 700 E Middlefield Rd, Mountain View, CA 94043 USA; 2.TSMC Ltd, Hsinchu 30077, Taiwan
推荐引用方式 GB/T 7714	Hung, D.,Canepa, J. P.,Kuo, K.,et al. Generating Well-Behaved OASIS Files for Mask Data Processing[C]:SPIE-INT SOC OPTICAL ENGINEERING,2012.