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DOI | 10.1016/S1001-0521(08)60045-5 |
InGaP/InGaAs/GaAs DHBT structural materials grown by GSMBE | |
Ai Likun; Xu Anhuai; Sun Hao; Zhu Fuying; Qi Ming | |
通讯作者 | Qi Ming |
会议名称 | 10th China/Korea Workshop on Advanced Materials |
会议日期 | AUG 21-24, 2006 |
会议地点 | Huangshan, PEOPLES R CHINA |
英文摘要 | Heterojunction bipolar transistor (HBT) is of great interest for the application to microwave power and analog circuits. As known, decreasing bandgap energy of the base layer in HBT can result in a smaller turn-on voltage. Using InGaAs as a base material in GaAs HBT is a possible approach to achieve the aim. In this work, a novel InGaP/InGaAs/GaAs double heterojunction bipolar transistor (DHBT) structure with an InGaAs base was designed and grown by gas source molecular beam epitaxy (GSMBE). High-quality InGaAs/GaAs hetero epi-layers and a good doping figure were obtained through optimizing the layer structure and the growth condition. The DHBT devices of a 120 mu m x 120 mu m emitter area were fabricated by normal process and the good DC performance was obtained. A breakdown voltage of 10 V arid an offset voltage of just 0.4 V were achieved. These results indicate that the InGaP/InGaAs/GaAs DHBT is suitable for low power-dissipation and high power applications. |
英文关键词 | double heterojunction bipolar transistor (DHBT) gas source molecular beam epitaxy (GSMBE) gallium arsenic (GaAs) indium gallium arsenic (InGaAs) |
来源出版物 | RARE METALS |
ISSN | 1001-0521 |
EISSN | 1867-7185 |
出版年 | 2006 |
卷号 | 25 |
页码 | 20-23 |
出版者 | NONFERROUS METALS SOC CHINA |
类型 | Article;Proceedings Paper |
语种 | 英语 |
国家 | Peoples R China |
收录类别 | SCI-E ; CPCI-S |
WOS记录号 | WOS:000244766500005 |
WOS关键词 | HBTS |
WOS类目 | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
资源类型 | 会议论文 |
条目标识符 | http://119.78.100.177/qdio/handle/2XILL650/296214 |
作者单位 | (1)Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China;(2)Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
推荐引用方式 GB/T 7714 | Ai Likun,Xu Anhuai,Sun Hao,et al. InGaP/InGaAs/GaAs DHBT structural materials grown by GSMBE[C]:NONFERROUS METALS SOC CHINA,2006:20-23. |
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