Arid
DOI10.1016/S1001-0521(08)60045-5
InGaP/InGaAs/GaAs DHBT structural materials grown by GSMBE
Ai Likun; Xu Anhuai; Sun Hao; Zhu Fuying; Qi Ming
通讯作者Qi Ming
会议名称10th China/Korea Workshop on Advanced Materials
会议日期AUG 21-24, 2006
会议地点Huangshan, PEOPLES R CHINA
英文摘要

Heterojunction bipolar transistor (HBT) is of great interest for the application to microwave power and analog circuits. As known, decreasing bandgap energy of the base layer in HBT can result in a smaller turn-on voltage. Using InGaAs as a base material in GaAs HBT is a possible approach to achieve the aim. In this work, a novel InGaP/InGaAs/GaAs double heterojunction bipolar transistor (DHBT) structure with an InGaAs base was designed and grown by gas source molecular beam epitaxy (GSMBE). High-quality InGaAs/GaAs hetero epi-layers and a good doping figure were obtained through optimizing the layer structure and the growth condition. The DHBT devices of a 120 mu m x 120 mu m emitter area were fabricated by normal process and the good DC performance was obtained. A breakdown voltage of 10 V arid an offset voltage of just 0.4 V were achieved. These results indicate that the InGaP/InGaAs/GaAs DHBT is suitable for low power-dissipation and high power applications.


英文关键词double heterojunction bipolar transistor (DHBT) gas source molecular beam epitaxy (GSMBE) gallium arsenic (GaAs) indium gallium arsenic (InGaAs)
来源出版物RARE METALS
ISSN1001-0521
EISSN1867-7185
出版年2006
卷号25
页码20-23
出版者NONFERROUS METALS SOC CHINA
类型Article;Proceedings Paper
语种英语
国家Peoples R China
收录类别SCI-E ; CPCI-S
WOS记录号WOS:000244766500005
WOS关键词HBTS
WOS类目Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS研究方向Materials Science ; Metallurgy & Metallurgical Engineering
资源类型会议论文
条目标识符http://119.78.100.177/qdio/handle/2XILL650/296214
作者单位(1)Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China;(2)Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式
GB/T 7714
Ai Likun,Xu Anhuai,Sun Hao,et al. InGaP/InGaAs/GaAs DHBT structural materials grown by GSMBE[C]:NONFERROUS METALS SOC CHINA,2006:20-23.
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