干旱区生态环境知识资源中心

Santa Barbara Infrared's (SBIR) family of MIRAGE infrared scene projection systems is undergoing significant growth and expansion. The first lot of production IR emitters is in fabrication at Microelectronics Center of North Carolina/Research and Development Institute (MCNC-RDI), the state-of-the-art MEMS foundry and R&D center which completed prototype fabrication in early 2003. The latest emitter arrays are being produced in support of programs such as Large Format Resistive Array (LFRA) and MIRAGE 1.5, MIRAGE 11, and OASIS. The goal of these new development programs is to increase maximum scene temperature, decrease radiance rise time, support cryogenic operation, and improve operability and yield. After having completed an extremely successful prototype run in 2003, SBIR and MCNC-RDI have implemented a variety of emitter process improvements aimed at maximizing performance and process yield. SBIR has also completed development and integration of the next-generation MIRAGE command and control electronics (C&CE), an upgraded calibration radiometry system (CRS), and has developed test equipment and facilities for use in MIRAGE device wafer probing, test, evaluation, diagnostic, and assembly processes. We present the latest emitter performance data, an overview of emitter foundry processing and packaging improvements, and an update on MIRAGE 11, LFRA, and OASIS development programs.