干旱区生态环境知识资源中心(Arid): New stream format: progress report on containing data size explosion

Arid

DOI	10.1117/12.485260
	New stream format: progress report on containing data size explosion
	LaCour, A; Reich, A; Nakagawa, K; Schulze, S; Grodd, L
通讯作者	LaCour, A
会议名称	Conference on Design and Process Integration for Microelectronic Manufacturing
会议日期	FEB 26-28, 2003
会议地点	SANTA CLARA, CA
英文摘要	The data volumes of individual files used in the manufacture of modem integrated circuits have become unmanageable using existing data formats specifications. The ITRS roadmap indicates that single layer MEBES files in 2002 reached the 50 GB range, worst case. Under the sponsorship of SEMI, a working group was formed to create a new format for use in describing integrated circuit layouts in a more efficient and extendible manner. This paper is a report on the status and potential benefits the new format can deliver.
英文关键词	GDSII stream OASIS integrated circuit layout mask making photomask
来源出版物	DESIGN AND PROCESS INTEGRATION FOR MICROELECTRONIC MANUFACTURING
出版年	2003
页码	214-221
ISBN	0-8194-4847-8
出版者	SPIE-INT SOC OPTICAL ENGINEERING
类型	Proceedings Paper
语种	英语
国家	USA
收录类别	CPCI-S
WOS记录号	WOS:000184996100022
WOS类目	Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Optics
WOS研究方向	Engineering ; Optics
资源类型	会议论文
条目标识符	http://119.78.100.177/qdio/handle/2XILL650/294199
作者单位	(1)Mentor Graph Corp, Wilsonville, OR 97070 USA
推荐引用方式 GB/T 7714	LaCour, A,Reich, A,Nakagawa, K,et al. New stream format: progress report on containing data size explosion[C]:SPIE-INT SOC OPTICAL ENGINEERING,2003:214-221.