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DOI | 10.1117/12.451911 |
Sol-gel derived barium strontium titanate thin films for uncooled infrared detector array applications | |
Cheng, JG; Tang, J; Chu, JH | |
通讯作者 | Cheng, JG |
会议名称 | Conference on Materials for Infrared Detectors II |
会议日期 | JUL 08-09, 2002 |
会议地点 | SEATTLE, WA |
英文摘要 | Columnar Ba0.8BSr0.2TiO3 films with a grain size of 100 to 200 nm have been obtained from a 0.05M precursor solution. Electrical measurements indicated these films showed a pyroelectric coefficient of 4.1 x 10(4) C/m(2)K at room temperature, arid a leakage current of 1.42 x 10(-7)A/cm(2) under 100 kV/cm electrical field. The Ba0.8BSr0.2TiO3 films have been used for fabricating a 1 x 16 elements infrared detector linear array with a bulk micromachining technique. The array pixels with a sensitive area of 500 x 300 mum(2) have a detectivity of 2.3 x 10(8) cmHz(1/2)W(-1) at 23 C and 35Hz. By using these infrared detector arrays, thermal images were successfully obtained at room temperature. These results indicate the sol-gel derived Ba0.8BSr0.2TiO3 films from a 0.05M precursor solution are suitable for uncooled infrared detector array applications. |
英文关键词 | sol-gel BaxSr1-xTiO3 pyroelectric properties uncooled infrared detector arrays |
来源出版物 | MATERIALS FOR INFRARED DETECTORS II |
ISSN | 0277-786X |
出版年 | 2002 |
卷号 | 4795 |
页码 | 100-106 |
ISBN | 0-8194-4562-2 |
出版者 | SPIE-INT SOC OPTICAL ENGINEERING |
类型 | Proceedings Paper |
语种 | 英语 |
国家 | Germany |
收录类别 | CPCI-S |
WOS记录号 | WOS:000180378100013 |
WOS关键词 | ELECTRICAL-PROPERTIES ; VOLTAGE RESPONSE ; MICROSTRUCTURE ; DEPOSITION ; SIGNALS ; NIOBATE ; SRTIO3 ; BATIO3 |
WOS类目 | Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Materials Science, Characterization & Testing ; Optics |
WOS研究方向 | Instruments & Instrumentation ; Materials Science ; Optics |
资源类型 | 会议论文 |
条目标识符 | http://119.78.100.177/qdio/handle/2XILL650/293897 |
作者单位 | (1)Siemens AG, CT MM 2, Corporate Technol, D-81739 Munich, Germany |
推荐引用方式 GB/T 7714 | Cheng, JG,Tang, J,Chu, JH. Sol-gel derived barium strontium titanate thin films for uncooled infrared detector array applications[C]:SPIE-INT SOC OPTICAL ENGINEERING,2002:100-106. |
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