Arid
DOI10.1117/12.451911
Sol-gel derived barium strontium titanate thin films for uncooled infrared detector array applications
Cheng, JG; Tang, J; Chu, JH
通讯作者Cheng, JG
会议名称Conference on Materials for Infrared Detectors II
会议日期JUL 08-09, 2002
会议地点SEATTLE, WA
英文摘要

Columnar Ba0.8BSr0.2TiO3 films with a grain size of 100 to 200 nm have been obtained from a 0.05M precursor solution. Electrical measurements indicated these films showed a pyroelectric coefficient of 4.1 x 10(4) C/m(2)K at room temperature, arid a leakage current of 1.42 x 10(-7)A/cm(2) under 100 kV/cm electrical field. The Ba0.8BSr0.2TiO3 films have been used for fabricating a 1 x 16 elements infrared detector linear array with a bulk micromachining technique. The array pixels with a sensitive area of 500 x 300 mum(2) have a detectivity of 2.3 x 10(8) cmHz(1/2)W(-1) at 23 C and 35Hz. By using these infrared detector arrays, thermal images were successfully obtained at room temperature. These results indicate the sol-gel derived Ba0.8BSr0.2TiO3 films from a 0.05M precursor solution are suitable for uncooled infrared detector array applications.


英文关键词sol-gel BaxSr1-xTiO3 pyroelectric properties uncooled infrared detector arrays
来源出版物MATERIALS FOR INFRARED DETECTORS II
ISSN0277-786X
出版年2002
卷号4795
页码100-106
ISBN0-8194-4562-2
出版者SPIE-INT SOC OPTICAL ENGINEERING
类型Proceedings Paper
语种英语
国家Germany
收录类别CPCI-S
WOS记录号WOS:000180378100013
WOS关键词ELECTRICAL-PROPERTIES ; VOLTAGE RESPONSE ; MICROSTRUCTURE ; DEPOSITION ; SIGNALS ; NIOBATE ; SRTIO3 ; BATIO3
WOS类目Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Materials Science, Characterization & Testing ; Optics
WOS研究方向Instruments & Instrumentation ; Materials Science ; Optics
资源类型会议论文
条目标识符http://119.78.100.177/qdio/handle/2XILL650/293897
作者单位(1)Siemens AG, CT MM 2, Corporate Technol, D-81739 Munich, Germany
推荐引用方式
GB/T 7714
Cheng, JG,Tang, J,Chu, JH. Sol-gel derived barium strontium titanate thin films for uncooled infrared detector array applications[C]:SPIE-INT SOC OPTICAL ENGINEERING,2002:100-106.
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