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DOI | 10.2172/96639 |
报告编号 | UCRL-ID--114972-3 |
来源ID | OSTI_ID: 96639 |
Characterization of thin-film multilayers using magnetization curves and modeling of low-angle X-ray diffraction data | |
Lane, M. [Emory & Henry College, VA (United States)]; Chaiken, A.; Michel, R.P. [Lawrence Livermore National Lab., CA (United States)] | |
英文摘要 | We have characterized thin-film multilayers grown by ion-beam sputtering using magnetization curves and modeling of low-angle x-ray diffraction data. In our films, we use ferromagnetic layer = Co, Fe, and NiFe and spacer layer = Si, Ge, FeSi{sub 2}, and CoSi{sub 2}. We have studied the effects of (1) deposition conditions; (2) thickness of layers; (3) different layer materials; and (4) annealing. We find higher magnetization in films grown at 1000V rather than 500V and in films with spacer layers of 50{angstrom} rather than 100{angstrom}. We find higher coercivity in films with cobalt grown on germanium rather than silicon, metal grown on gold underlayers rather than on glass substrates, and when using thinner spacer layers. Finally, modeling reveals that films grown with disilicide layers are more thermally stable than films grown with silicon spacer layers. |
出版年 | 1994 |
报告类型 | Technical Report |
语种 | 英语 |
国家 | 美国 |
来源学科分类 | 36 MATERIALS SCIENCE ; 66 PHYSICS ; COBALT SILICIDES ; MAGNETIZATION ; IRON SILICIDES ; LAYERS ; ANNEALING ; GLASS ; GERMANIUM ; GOLD ; THIN FILMS ; ELECTRON DENSITY ; MORPHOLOGY ; SPUTTERING |
URL | http://www.osti.gov/scitech/servlets/purl/96639 |
资源类型 | 科技报告 |
条目标识符 | http://119.78.100.177/qdio/handle/2XILL650/265940 |
推荐引用方式 GB/T 7714 | Lane, M. [Emory & Henry College, VA ,Chaiken, A.,Michel, R.P. [Lawrence Livermore National Lab., CA . Characterization of thin-film multilayers using magnetization curves and modeling of low-angle X-ray diffraction data,1994. |
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