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| High resolution time-resolved imaging system in the vacuum ultraviolet region | |
| Jang;Yuseong | |
| 出版年 | 2014 |
| 学位授予单位 | University of Central Florida |
| 英文摘要 | High-power debris-free vacuum ultraviolet (VUV) light sources have applications in several scientific and engineering areas, such as high volume manufacturing lithography and inspection tools in the semiconductor industry, as well as other applications in material processing and photochemistry. For the past decades, the semiconductor industry has been driven by what is called "Moore's Law". The entire semiconductor industry relies on this rule, which requires chip makers to pack transistors more tightly with every new generation of chips, shrinking the size of transistors. The ability to solve roadmap challenges is, at least partly, proportional to our ability to measure them. The focus of this thesis is on imaging transient VUV laser plasma sources with specialized reflective imaging optics for metrology applications. The plasma dynamics in novel laser-based Zinc and Tin plasma sources will be discussed. The Schwarzschild optical system was installed to investigate the time evolution of the plasma size in the VUV region at wavelengths of 172 nm and 194 nm. The outcomes are valuable for interpreting the dynamics of low-temperature plasma and to optimize laser-based VUV light sources. M.S. Masters Optics and Photonics Optics and Photonics Optics and Photonics |
| 语种 | 英语 |
| URL | http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/6293 |
| 来源机构 | University of Central Florida |
| 资源类型 | 学位论文 |
| 条目标识符 | http://119.78.100.177/qdio/handle/2XILL650/248651 |
| 推荐引用方式 GB/T 7714 | Jang;Yuseong. High resolution time-resolved imaging system in the vacuum ultraviolet region[D]. University of Central Florida,2014. |
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