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Advanced treatment units (ATUs) are highly recommended for industrial wastewater reuse in the developing countries especially in arid and semi-arid areas. Reliability of a hybrid treatment system comprised of a number of individual ATUs remains blur due to lack of conceptual framework, collected data or experience in failure performance analysis of these treatment systems. This paper presents a new methodological framework for assessing reliability of hybrid system alternatives in industrial wastewater treatment by using combined event tree analysis (ETA) and fault tree analysis (FTA). The framework comprises three major steps: (1) identification of feasible alternatives; (2) reliability analysis assessment using combined FTA and ETA with fuzzy logic techniques to calculate first failure probability of individual ATUs and then reliability of each hybrid system alternative; (3) prioritisation of alternatives. Failure probability rate of events in FTA is determined by experts’ judgement. The suggested framework is demonstrated through its application to a real case study of wastewater treatment plants of industrial parks in Iran. The results show the highest failure probabilities are reverse osmosis unit with 30% and ozonation unit with 24%, while coagulation and flotation unit has the lowest failure probability of 5.4%. The most reliable alternative of hybrid system is comprised of sand filter + activated carbon + micro filter + ultra-filter + ion exchange with 74.82% reliability. Results in this study also show that selecting Allis with higher removal efficiencies or rate of acceptable scenarios to form a hybrid ATU system cannot necessarily lead to a more reliable hybrid system without performing suggested FTA and ETA in this paper. (C) 2018 Elsevier Ltd. All rights reserved.